In-line, HDM-driven Process Control

Background

  • Breakthrough in manufacturing needs high definition metrology (HDM) to significantly enhance precision and accuracy in manufacturing.
  • Coherix’s innovative HDM is able to achieve measurement solution down to a sub-micron range at a wider view.
  • It becomes more challenging to consistently manufacture parts with micron accuracy in actual production environment.
  • Traditional statistical process control is no longer applicable for HDM data due to dynamic correlation.

Objective

  • To develop in-process control strategies based on HDM data to improve process stability and capability.

Approach

  • Conduct engineering modeling for manufacturing processes.
  • Integrate statistical analysis with engineering insights.
  • Implement optimal control to minimize process output variation.
An example problem of process diagnosis based on HDM data

Researchers

  • John Nanry
  • Hui Wang